发明名称 |
MANUFACTURE OF PLASMA DISPLAY PANEL |
摘要 |
PROBLEM TO BE SOLVED: To form pattern of high adhesiveness by forming a latent image of a resist pattern by exposing a resist layer formed by including a monofunctional or bifunctional (metha)acrylate compound onto an inorganic powder-contained resin layer, and forming a pattern of the inorganic powder- containing resin layer through the developing and etching processes. SOLUTION: A resist layer including the monofunctional or bifunctional (metha)acrylate compound is formed on an inorganic powder-containing resin layer formed by coating base an inorganic powder-containing resin composition, and drying the coated film. An exposed resist layer is developed to make a resist pattern visible to form the resist pattern. The inorganic powder-containing resin layer is etched to form pattern corresponding to the resist pattern. The resist residue remained after the etching process is baked to obtain a color filter or a panel material for forming a pattern of black matrix. |
申请公布号 |
JP2001084893(A) |
申请公布日期 |
2001.03.30 |
申请号 |
JP19990263356 |
申请日期 |
1999.09.17 |
申请人 |
JSR CORP |
发明人 |
OKAMOTO KENJI;ITANO TAKAFUMI;NOMA SETSUKO |
分类号 |
H01J9/02;G03F7/40;H01J9/227;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/36;H01J11/38;H01J11/40;H01J11/42;H01J11/44;H04N5/66;(IPC1-7):H01J9/02;H01J11/02 |
主分类号 |
H01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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