发明名称 MANUFACTURE OF PLASMA DISPLAY PANEL
摘要 PROBLEM TO BE SOLVED: To form pattern of high adhesiveness by forming a latent image of a resist pattern by exposing a resist layer formed by including a monofunctional or bifunctional (metha)acrylate compound onto an inorganic powder-contained resin layer, and forming a pattern of the inorganic powder- containing resin layer through the developing and etching processes. SOLUTION: A resist layer including the monofunctional or bifunctional (metha)acrylate compound is formed on an inorganic powder-containing resin layer formed by coating base an inorganic powder-containing resin composition, and drying the coated film. An exposed resist layer is developed to make a resist pattern visible to form the resist pattern. The inorganic powder-containing resin layer is etched to form pattern corresponding to the resist pattern. The resist residue remained after the etching process is baked to obtain a color filter or a panel material for forming a pattern of black matrix.
申请公布号 JP2001084893(A) 申请公布日期 2001.03.30
申请号 JP19990263356 申请日期 1999.09.17
申请人 JSR CORP 发明人 OKAMOTO KENJI;ITANO TAKAFUMI;NOMA SETSUKO
分类号 H01J9/02;G03F7/40;H01J9/227;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/36;H01J11/38;H01J11/40;H01J11/42;H01J11/44;H04N5/66;(IPC1-7):H01J9/02;H01J11/02 主分类号 H01J9/02
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