发明名称 Selective filtration of species from number of components of plasma involves feeding components to channel, and simultaneously applying static or quasi-static magnetic field and electromagnetic alternating field
摘要 Selective filtration of a species from a number of components of a plasma comprises feeding the components to the inlet of a channel (2) with an inlet (35) and an outlet (36); applying a static or quasi-static magnetic field to the filter channel, the magnetic field having field strength vectors from the inlet to the outlet; and simultaneously applying an electromagnetic alternating field. For the frequency, w, of the electromagnetic alternating field, a value is adjusted below the ion cyclotron frequency wj of the species to be filtered, the same as wcj or larger than wcj up to a maximum of 2wcj. The electric fields of the electromagnetic alternating field has a component vertical to the main magnetic field. An Independent claim is also included for an apparatus for the selective filtering of a species from a number of components of a plasma.
申请公布号 DE19938824(A1) 申请公布日期 2001.03.29
申请号 DE19991038824 申请日期 1999.08.19
申请人 FORSCHUNGSZENTRUM JUELICH GMBH 发明人 FINKEN, KARL-HEINZ;SHOJI, TAQTSUO;MANK, GUENTER
分类号 B01D53/32;H01J49/20;(IPC1-7):H05H1/00;H01J49/42;B01J19/08 主分类号 B01D53/32
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