Piezo-electrically actuated micro-valve e.g. for pneumatic and fluid systems for control of gas- and liquid-flows, uses speed transforming gear designed as H-shaped molded part

摘要

Piezo-electrically actuated micro-valves require correct and accurate balancing out of manufacturing tolerances which otherwise can lead to problems of bending of the valve plates and locking of the micro-valve apertures during operation. The speed-transforming gear e.g. in measurement engineering devices and in plotting and recording equipment, is designed as a H-shaped molded part with symmetrical half-limbs (17,18) which are joined to one another via a spring-loaded coupling member (15), and in the middle of the molded part (9) is inserted a valve plunger (10) which lies with its end face on the coupling element (15), and between the upper half-limbs is arranged a piezo-actuator (8) and between the lower half-limbs (18) of the molded part (9) is arranged an actuator (11) for varying the spacing.