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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH08330276(A)
申请公布日期
1996.12.13
申请号
JP19950131920
申请日期
1995.05.30
申请人
RES DEV CORP OF JAPAN
发明人
KANEKO TADAAKI;KAWAMURA TAKAAKI
分类号
C23F1/12;C23F4/00;H01L21/302;H01L21/306;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F1/12
代理机构
代理人
主权项
地址
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