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发明名称
Projektionsapparat zur Abtastbelichtung und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben
摘要
申请公布号
DE69703395(T2)
申请公布日期
2001.03.29
申请号
DE19976003395T
申请日期
1997.01.14
申请人
CANON K.K., TOKIO/TOKYO
发明人
MISHIMA, KAZUHIKO
分类号
G03F7/20;G03F7/207;G03F9/00;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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