| 发明名称 |
PARALLEL MECHANISM AND TEST APPARATUS |
| 摘要 |
A parallel mechanism includes three expandable linear actuators (5,12,13); drive means for supporting the proximity ends of the linear actuators (5,12,13) so that they can move along guide rails (2,6,7), at least one of the guide rails including slopes (102, 103) on which the actuators (12, 13) run with their levels varying; a stage support (23) held by the distal ends of the linear actuators (5, 12, 13); and a wafer holder (24) attached to a moving member for holding a workpiece.
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| 申请公布号 |
WO0122069(A1) |
申请公布日期 |
2001.03.29 |
| 申请号 |
WO2000JP06476 |
申请日期 |
2000.09.21 |
| 申请人 |
OLYMPUS OPTICAL CO., LTD.;HEPHAIST SEIKO CO., LTD.;OKADA, NAOBUMI;NAKAHARA, NAOHISA;TAKAHASHI, HAJIME;KIBA, HIROYUKI;HIROSE, KAZUYA |
发明人 |
OKADA, NAOBUMI;NAKAHARA, NAOHISA;TAKAHASHI, HAJIME;KIBA, HIROYUKI;HIROSE, KAZUYA |
| 分类号 |
B23Q1/56;B23Q1/60;B23Q1/62;B25J17/02;(IPC1-7):G01N21/84;F16H21/46 |
主分类号 |
B23Q1/56 |
| 代理机构 |
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代理人 |
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