| 摘要 |
A means, for correcting the position in the Z-direction of a microscope as a result of a displacement of a microscope XY stage, controls a microscope XYZ stage for storing in memory. A still image is captured and the XYZ stage is moved to a mesh position. A Z-position is fine-moved according to the movement of XY. If an AF operation can be performed, AF is performed, or otherwise the system returns to the preceding Z-position.
|
