PRODUCTION OF TERNARY SHAPE-MEMORY ALLOY FILMS BY SPUTTERING
摘要
A method of producing thin film deposits of ternary shape-memory alloys using an ion sputtering deposition process comprising using a hot pressed metal powder composition target.
申请公布号
WO0121851(A1)
申请公布日期
2001.03.29
申请号
WO2000US26182
申请日期
2000.09.22
申请人
DELPHI TECHNOLOGIES, INC.
发明人
RASMUSSEN, GREGORY, KELLER;CHANG, FENGLIAN;ZHANG, JINPING;GOLD, TERRY, JACK
