发明名称 Ultrasonic bonding apparatus with a sensor for regulating the bonding force
摘要 The bonder (1) has a wiper (3) which is rotated about a horizontal axis (2), provided with an attached horn (5) with a feed capillary (8) for the wire (7) at its end (6) and a sensor (10) used for regulation of the force exerted on the capillary during bonding, by detecting the deflection of the end of the horn relative to the wiper, e.g. via an optical sensor using a light barrier.
申请公布号 EP1086777(A1) 申请公布日期 2001.03.28
申请号 EP20000810840 申请日期 2000.09.18
申请人 ESEC TRADING S.A. 发明人 FELBER, ARMIN
分类号 B23K20/00;B23K20/10;H01L21/607 主分类号 B23K20/00
代理机构 代理人
主权项
地址