| 摘要 |
PROBLEM TO BE SOLVED: To take out Raman scattering light and simultaneously perform observation of optical microscopic image. SOLUTION: Pumping laser light of wavelengthλ1 reflected from the measuring point of a sample 12 and Raman scattering light generated from the measuring point of the sample 12 pass through an objective lens 20 and a dichroic beam splitter 42 sequentially thence pass through a beam splitter 18 and an eyepiece 22 on one hand and is reflected by the beam splitter 18 on the other hand. In this regard, Raman scattering light passes through a dichroic beam splitter 16 and is made incident on a spectrometer 34. Illumination laser light of wavelengthλ2 reflected from the measuring point of the sample 12 passes through the objective lens 20 and a half mirror 40, reflected by the dichroic beam splitter 42 and passes through an eyepiece 22A. A laser light spot of wavelengthλ1 at the measuring point of the sample 12 is observed through the eyepiece 22 and the focus of an optical microscope is adjusted with respect to the sample. On the other hand, the sample 12 is observed through the eyepiece 22A.
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