发明名称 |
Compact helical resonator coil for ion implanter linear accelerator |
摘要 |
A compact coil design is provided for a linear accelerator resonator (70) capable of resonating at a predetermined frequency. The coil (90) comprises a plurality of generally circular coil segments (90a-90n), each of the coil segments having a polygonal cross section wherein flat surfaces (122) of adjacent coil segments face each other. The polygonal cross section may take the form of a rectangle having dimensions of length x and width y, wherein dimension x section defines the flat surfaces (122) of adjacent coil segments (90a-90n). The coil segments (90a-90n) are provided with a dual channel construction for providing the introduction of a cooling medium into the coil. The dual channel construction comprises an inlet passageway (118) and an outlet passageway (120) having separate a separate inlet (100) and outlet (102), respectively, at a first end (94) of the coil, and wherein the inlet and outlet passageways (118, 120) are connected and in communication with each other at a second end (96) of the coil.
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申请公布号 |
US6208095(B1) |
申请公布日期 |
2001.03.27 |
申请号 |
US19980219686 |
申请日期 |
1998.12.23 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
DIVERGILIO WILLIAM F.;SAADATMAND KOUROSH;QUINN STEPHEN M. |
分类号 |
H01J37/317;C23C14/48;H01F5/00;H01L21/265;H05H7/02;H05H7/18;H05H9/00;(IPC1-7):H01P7/00;H01P1/208 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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