| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming equipment capable of obtaining various film compositions and film constructions, capable of efficiently producing the desired thin film in a short time, and particularly capable of easily forming a thin film having gradient refractive index and a method of film formation using the film forming equipment. SOLUTION: A film forming equipment 1 has a chamber 2, a holding part 4 for holding substrates 3, a film thickness meter 5, a shutter 6, a first material supply source 7, a second material supply source, a shutter means 11, and a control means 12. The shutter means 11 is provided with a shield plate 18 having an opening and a driving system for rotating the shield plate 18, and the degree of opening varies with the rotation of the shield plate 18. |
