发明名称 Corrosion-resistant members against a chlorine-based gas
摘要 A corrosion-resistant member against a chlorine-based gas, which member is to be exposed to a chlorine-based gas atmosphere at temperatures of not less than 600° C. and includes a sintered body made of aluminum nitride and a film of silicon carbide covering a surface of the sintered body and formed by chemical vapor deposition.
申请公布号 US6207305(B1) 申请公布日期 2001.03.27
申请号 US19990413128 申请日期 1999.10.06
申请人 NGK INSULATORS, LTD. 发明人 NISHIOKA MASAO;KATO NAOTAKA
分类号 H01L21/205;C04B41/50;C04B41/87;C23C14/56;C23C16/32;C23C16/44;C23C16/458;H01L21/00;H05B3/14;(IPC1-7):B32B9/00 主分类号 H01L21/205
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