| 发明名称 |
Monitoring focus of a lens imaging system based on astigmatism |
| 摘要 |
Methods for determining a focus position of a lens system based on astigmatism. The methods can be used to monitor the focus of the lens system or to determine the flatness of a surface.
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| 申请公布号 |
US6208748(B1) |
申请公布日期 |
2001.03.27 |
| 申请号 |
US20000479381 |
申请日期 |
2000.01.05 |
| 申请人 |
INTEL CORPORATION |
发明人 |
TROCCOLO PATRICK M.;GRENVILLE ANDREW |
| 分类号 |
G02B7/28;G03F7/20;(IPC1-7):G06K9/00 |
主分类号 |
G02B7/28 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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