发明名称 |
Integrated flow controller module |
摘要 |
A flow controller module comprising at least one micro flow sensor and a microvalve, integrated in a micro flow channel, is disclosed. The micro flow sensor comprises a pressure sensitive flow sensor. At the position of the micro flow sensor, the micro flow channel is provided with an orifice so that pressure of a flow may be enlarged to facilitate measurement of the flow speed. The microvalve comprises a silicon microbridge with a mesa structure and is driven by a voltage. The microvalve may operate under a normally closed mode or a normally open mode. Disclosed in this invention is also a flow sensor suited in the integrated flow controller module. Methods for preparing the flow sensor and the flow controller module are also disclosed.
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申请公布号 |
US6206022(B1) |
申请公布日期 |
2001.03.27 |
申请号 |
US20000480997 |
申请日期 |
2000.01.11 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
TSAI MING-JYE;WAN YUE-MIN;KE CHUN-HSU;JANG RUEI-HUNG;WU CHING-YI;HUANG RAEY-SHING;PENG CHENG-JIEN |
分类号 |
G05D7/06;(IPC1-7):G05D7/06 |
主分类号 |
G05D7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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