| 摘要 |
The gas laser oscillator having metal housings disposed near internal mirrors of the resonator for covering, for example, the external of connecting tubes partially or totally, means for detecting the micro discharge current flowing inside of the connecting tubes near the internal mirrors of the resonator, and a control circuit for controlling energy to be supplied into discharge tubes by comparing output signals output from the means for detecting the micro discharge current with reference signals. The gas laser oscillator prevents the micro discharge current from flowing in laser gas inside of the connecting tubes, thereby preventing degradation of a total reflection mirror and a partial reflection mirror defining the internal mirrors of the resonator.
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