| 摘要 |
PROBLEM TO BE SOLVED: To make the leakage magnetic field intensity and the shape of the magnetic field optimum by fixing an outside magnet in a magnet unit, allowing only the inside magnet to eccentrically rotate and moreover moving the inside magnet to the direction vertical to the surface of the target in accordance with the magnetic permeability of the target. SOLUTION: A ferromagnetic target 32 is fixed to the surface of a cathode body 30. The inside of the cathode body 30 is provided with a magnet unit 34. An inside magnet 40 is fixed to an inside yoke 36, an outer circumferential magnet 42 is fixed to an outer circumferential yoke 38. The outer circumferential yoke 38 is fixed to the cathode body 30. The inside yoke 36 rotates by a first motor 44. The first motor 44 is fixed to a bracket 46, a nut 48 fixed to the bracket 46 is engaged with a ball screw 50. The ball screw 50 is jointed to the rotary shaft of a second motor 52. When the second motor 52 is rotated, the inside magnet 40 ascends and descends.
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