| 摘要 |
PROBLEM TO BE SOLVED: To improve a displacement quantity of a piezoelectric element by preventing a yield from decreasing due to chipping when the piezoelectric element and a substrate are grooved. SOLUTION: A plurality of thin grooves 14 are formed to a part joined to piezoelectric elements 5 on a primary face of a substrate, which are orthogonal to grooves 12 formed to separate the piezoelectric elements 5 joined to the substrate. The plurality of thin grooves 14 reduce a rigidity in a horizontal direction of the part of the substrate 1 joined to the piezoelectric elements 5, and a force of constraint of the substrate to the piezoelectric elements 5. A displacement of the piezoelectric elements 5 in a direction orthogonal to the substrate when a voltage is impressed to the piezoelectric elements 5 is increased, so that printing is carried out with a higher plotting speed.
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