Gate array and manufacturing method of semiconductor integrated circuit using gate array

摘要

In a gate array, a gate length is measured by dividing gate electrodes into groups according to their materials to distinguish between those groups. The shape of a contact pad portion (5) of a gate electrode (4) differs according to the groups. A difference described here appears as shape such as cutouts (6a-6c) or projections (6d-6f), which is distinguishable by a scanning electron microscope, for example.