发明名称 Using DUV curing to form a protective coating for color filters
摘要 A structure and method for producing color filters with a protective highly cross-linked and densified polymer layer is described. In one embodiment, each filter is coated with a highly cross-linked and densified polymer layer to prevent bleeding of material between closely spaced filters during the fabrication process. In a second embodiment, the highly cross-linked and densified polymer layer is used to protect an array of filters from physical damage during detaping operations. In a third embodiment, the highly cross-linked and densified polymer layer is used before fabrication later filters in a color filter array to prevent damage to previous filter layers.
申请公布号 US6207947(B1) 申请公布日期 2001.03.27
申请号 US19980040626 申请日期 1998.03.18
申请人 INTEL CORPORATION 发明人 WESTER NEIL
分类号 G01J3/50;G02B1/10;G02F7/00;H01L27/146;(IPC1-7):G01J3/50 主分类号 G01J3/50
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