PLASMA-ASHING METHOD,申请号JP19980140003-传众专利搜索

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发明名称	PLASMA-ASHING METHOD
摘要
申请公布号	JPH1145873(A)	申请公布日期	1999.02.16
申请号	JP19980140003	申请日期	1998.05.21
申请人	ULVAC JAPAN LTD	发明人	KIKUCHI MASASHI;WATABE TOKUO;TAKADA TOSHINARI
分类号	H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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