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发明名称
IN-SITU SUBSTRATE TRANSFER SHUTTLE
摘要
申请公布号
KR20010025065(A)
申请公布日期
2001.03.26
申请号
KR1020007013030
申请日期
2000.11.20
申请人
发明人
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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