| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact illumination optical system capable of uniformly illuminating a surface to be irradiated without collimating light from a light source. SOLUTION: In this illumination optical system, a surface to be irradiated 15 is irradiated with emitted light from an incoherent light source 11 by using a reflector 12 functioning as a 1st lens array consisting of a concave mirror array, a 2nd lens array 13 and a condenser lens 14, so that the illumination optical system becomes the compact illumination optical system capable of uniformly illuminating the surface to be irradiated 5 without collimating the light from the light source 11. |
