| 摘要 |
PROBLEM TO BE SOLVED: To improve the mounting precision and the yield and to reduce the manufacturing cost by directly mounting a ferrule holding an optical fiber at the center into a V shaped groove provided in a silicon substrate on which an LD element is mounted. SOLUTION: The V shaped groove 3 is formed in a silicon substrate 1 by anisotropic etching and a slit part 4 is formed there. An LD element 2 is mounted on the silicon substrate 1 with high precision matching a mark being a positioning reference when mounted. An optical fiber 6 is held and fixed to the central part of a ferrule 5 mounted into the V shaped groove 3 of the silicon substrate 1. The depth of the V shaped groove 3 is set matching the outside diameter of the ferrule 5 to be used and is formed so as to be the optimal position for realizing optical coupling between the optical fiber 6 and the LD element 2. Although zirconia, metal and borosilicate glass or the like can be used when the ferrule 5 is formed, zirconia is preferably used in consideration of strength when the size of the outside diameter is limited.
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