| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a superior accelerometer whose structure is comparatively simple, which is low-cost and whose performance is high. SOLUTION: A diaphragm 37 is provided in such a way that it has a prescribed thickness, that it is provided with two planes 37a, 37b which are substantially parallel and that it is composed of a conductive member. A piezoelectric element layer 34 is provided in such a way that at least two sheetlike piezoelectric elements 33 which are composed of a piezoelectric element material and which have a prescribed thickness and two planes are bonded onto the plane 37a on one side in the diaphragm 37 by using an adhesive so as to be laminated. An electrode 35b is provided in such a way that it is formed so as to be extended partially onto the uppermost face of the piezoelectric element layer 34. A support part 11a provided in such a way that it supports the diaphragm 37 so as to be capable of being vibrated to the substantially vertical vibration direction. This accelerometer is constituted in such a way that every piezoelectric element 33 in the piezoelectric element layer 34 is polarized to a direction which is substantially at right angles to the electrode 35b which is formed on the piezoelectric elements 33 and that directions of polarization of the piezoelectric elements 33 which are adjacent to each other inside the piezoelectric element layer 34 are opposite.</p> |
