| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for the production of a microlens array substrate which hardly causes irregularity in brightness when the substrate is used for a liquid crystal projector or the like. SOLUTION: When a microlens 101A is to be formed, the original thickness of the base body is locally maintained to form a spacer 500A which regulates the distance between a first substrate 100A and a second substrate 200A. First, a first mask 10A is formed on the first substrate 100A. Then, a second mask 110A corresponding to the microlens 101A is formed. Then the second mask 110A is made to reflow into a lens shape. The first mask 10A is shaped into a spacer 500A by wet etching, and the first substrate 100A is subjected to dry etching to form convex microlenses 101A and spacer 500A at a time. After the first mask 12A is removed, the second substrate 200A is joined to the first substrate 100A. |
