| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus which can improve its processing ability, without making it complicated. SOLUTION: When a wafer is transferred between a plurality of processing units within a processing station 11 and when secondary wafer transfer devices 21 and 24 for feeding in or out are normally not operated within a cassette station 10 or an interface section 12 in a normal mode, the secondary transfer devices 21 and 24 transfer the wafer between the plurality of processing units within the processing station 11 and assist part of a transfer step of a primary wafer transfer device 46. |
