| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrying unit for carrying a substrate in a stored state in a carrier safely at a low cost and make contribution to effective production. SOLUTION: A carrying unit includes a carrying truck 14, a holding member 18 capable of moving up and down and supported by the carrying truck 14, a cover 20 with a lower opening at the holding member 18, a mounting unit 22 put at the holding member 18, for mounting a carrier with the stored substrate in the cover 20, and a substrate coming-off preventive mechanism 24 for preventing the substrate from coming off the carrier while the carrier is held to the mounting unit 22. |
