发明名称 CHARGED-PARTICLE BEAM APPARATUS
摘要 PROBLEM TO BE SOLVED: To suppress vibrations of a lens barrel. SOLUTION: A dynamic vibration absorber 20 is formed to have a characteristic, frequency substantially equal to the characteristic frequency of supports 10A, 10B, 10C mounted with an exhaust system 3 thereon and mounted on a flange 11. Vibrations arize from a floor 12, via a vibration resistant table and a pedestal 8, into the supports and the dynamic vibration absorber 20. The dynamic vibration absorber 20 produces resonance due to a vibration with a frequency equal to or substantially equal to that of the supports among the incoming vibrations, thus absorbing vibration of such a frequency.
申请公布号 JP2001076660(A) 申请公布日期 2001.03.23
申请号 JP19990252495 申请日期 1999.09.07
申请人 JEOL LTD 发明人 ISHIKAWA TOYOJI
分类号 H01J37/16;H01J37/18;(IPC1-7):H01J37/16 主分类号 H01J37/16
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