| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a clear SEM(scanning electronic microscope) image by arranging a conductive material while one part of the conductive material is brought into contact with a target sample, at the same time, surrounds the sample on a measurement plane, and is exposed on planes opposite to the measurement plane. SOLUTION: At the center part of the bottom member of a mold container made of silicon, a light-emitting diode 2 used as a sample is placed while a lead frame is in parallel with the bottom surface of the bottom member. Then, a conductive material member 3 is accommodated into the mold container by eliminating a part interfering with the light-emitting diode 2 being placed first when the surface of the honeycomb structure of the conductive material member 2 is installed onto the bottom surface of the bottom member of the container, and the surface of the honeycomb structure faces the bottom surface of the bottom member for arranging while the surface of the honeycomb structure is brought into contact with the sample 2. In this case, a liquid insulating resin material 1 being prepared in advance is poured into it, and curing is made by leaving in a room as it is under specific conditions. On a metallic disk-shaped sample rest being attached to an SEM, a surface where the light-emitting diode 2 is embedded is placed upward, and an image is observed.</p> |
