LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a liquid crystal display device utilizing a thin film transistor, which is reduced in defect and is capable of being manufactured in a high yield. SOLUTION: A gate wiring 2 and a gate insulating film 3 are successively formed on a glass substrate 1 in this order and a semiconductor layer 4 consisting of an i-amorphous silicon layer and constituting a channel part 16 and an ohomic contact layer 5 consisting of an n+-amorphous silicon layer are successively formed on the gate insulating film 3 in this order. Finally a conductive layer consisting of two layers is formed on the n+-amorphous silicon layer by a sputtering film-forming treatment using chromium as a target material in either case to form a source electrode 12 or a drain electrode 13 having a excellent step coverage coated film property.