SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To generally manage and control a parameter change and the like on a host side and to provide much information on a transported substrate on a device side also. SOLUTION: The system has a fist device 2 executing a first processing on a substrate P and a second device 3 executing a second processing on the substrate P. A communication means 19 for communicating an information on the substrate P from the first device 2 to the second device 3, and a control part 52 communicating control information on the first processing to the first device 2 based on information on the substrate P and communicating a control information on the second processing to the second device 3 based on a communication result having been communicated to the second device 3 are installed.