SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE,申请号JP19980052390-传众专利搜索

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发明名称	SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURE
摘要
申请公布号	JPH11251425(A)	申请公布日期	1999.09.17
申请号	JP19980052390	申请日期	1998.03.04
申请人	HITACHI LTD	发明人	SAIKAWA KENJI;ONISHI YOSHIFUMI;TAMARU TAKESHI;OWADA NOBUO
分类号	H01L21/76;H01L21/318;H01L21/762;(IPC1-7):H01L21/76	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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