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发明名称
INDUCTIVE COUPLING PLASMA DEVICE
摘要
申请公布号
JPH11251088(A)
申请公布日期
1999.09.17
申请号
JP19980051685
申请日期
1998.03.04
申请人
FUJI ELECTRIC CO LTD
发明人
SAKAKIBARA YASUSHI
分类号
H05H1/46;(IPC1-7):H05H1/46
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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