发明名称 SUPPORT STRUCTURE FOR VIBRATOR
摘要 PROBLEM TO BE SOLVED: To provide a support structure of for a vibrator where vibration of the vibrator is made hard to leak and with less characteristics degradation. SOLUTION: At a part corresponding to two node points for curvature vibration of a vibrator 10, support members 28 and 30 are fitted to electrodes 18a and 18b as well as to electrodes 20a and 20b, with the support member 28 connected to an electrode 22, while the support member 30 is connected to an electrode 24. At a part corresponding to the node point of the vibrator 10, support members 32 and 34 are fitted to a full-surface electrode 26. the support members 28 and 30 are insert-molded in a first support stage 36, while support members 32 and 34 are insert-molded in a second support stage 38. The two support stages 36 and 38 are stacked and bonded.
申请公布号 JP2001074468(A) 申请公布日期 2001.03.23
申请号 JP19990253788 申请日期 1999.09.08
申请人 MURATA MFG CO LTD 发明人 TAKAYA TADASHI
分类号 H01L41/09;G01C19/56;G01P9/04 主分类号 H01L41/09
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