摘要 |
PROBLEM TO BE SOLVED: To obtain a highly reliable semiconductor optical element having long service life by suppressing the increase of defects which makes the optical element nonradiative. SOLUTION: A highly reliable semiconductor optical element 1 can make high output operations over a long time, has a long service life, and suppresses diffusion and increase of nonradiative point defects. The elements 1 is constituted by successively forming a p-type clad layer 102, a light guide layer 104a, an active layer 103, a light guide layer 104b, an n-type clad layer 105, an n-type contact layer 106, and a device protective layer 107 having large bond energy on a p-type semiconductor substrate 101.
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