| 摘要 |
PROBLEM TO BE SOLVED: To provide a low-priced device and method which can promptly detect a detection object in different accuracy levels of demanded height detection and in the different ranges of demanded detection height provided in the same inspection object. SOLUTION: In a 'shape from defocus' system, one of projection patterns 3, 4 of different pitches in correspondence with demanded detection conditions of a detection object in a detection object 10 is inserted into an optical path of illumination lights from a light source 1. This projection pattern is projected to the detection object, and the reflected lights are received by a line sensor 12, so that images of the projection pattern in the detection object are detected. The detected images are different in the degree of focusing misalignment, in correspondence with a positional relationship between the detection object and the line sensor 12, and a height detector 15 acquires focusing measuring accuracy in correspondence with the focusing misalignment of the detection image, and a height of the detection object from this focusing measuring accuracy. A shape of the focusing measuring precision is different between, when a projection pattern member 3 in the optical path is inserted and when the projection pattern 4 is inserted, and thus the sizes of the height detection accuracy and the height detection range are made to be different.
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