| 摘要 |
PROBLEM TO BE SOLVED: To provide a quick and efficient technique for accurately aligning two members above a board. SOLUTION: This device has a board support 1, means 3 and 4 for carrying two members to a board 2, a means for adjusting the position of the board in a first direction X, and means 7, 11, and 12 for adjusting the positions of the carriage means centered around a rotary shaft parallel with a second direction Y and a third direction Z. The first to third directions are orthogonal to each another. Recognition means 13 and 14 are provided at least one carriage means, so that they can detect the position of an alignment mask given to the substrate.
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