| 摘要 |
<p>PROBLEM TO BE SOLVED: To monitor a control network during operation and, when abnormality occurs, to safely stop sub-controllers. SOLUTION: The control system 10 of a batch type CVD device has a control section 11 which controls sub-controllers 12-15 through a control network 16, an operating section 17 which commands operation and displays states, and an operating section/control section network 18 which connects the operating section 17 to the control section 11. The system 10 also has an operating section network 19 which connects the operating section 17 to the control network 16. The operating section 17 has a monitoring and fault dealing section 20 which monitors the presence/absence of abnormality in the control section 11 and deals with a fault when abnormality is detected. Therefore, the fault of a semiconductor manufacturing device or the defects of all wafers can be prevented by safely stopping the sub-controllers 12-15 when abnormality is detected. In addition, when the control network 16 and control section 11 are always monitored, the state when a fault occurs can be grasped and used for the analysis of the fault.</p> |
