| 摘要 |
PROBLEM TO BE SOLVED: To obtain a small-sized inspection system easy to handle capable of simply inspecting the internal state of a semiconductor element sealed by a transparent or opaque synthetic resin material. SOLUTION: A semiconductor element 23 to be inspected of which the package comprises a synthetic resin material is positioned within the imaging region of a CCD imaging apparatus 34 equipped with a CCD camera 32 wherein an infrared transmission filter 31 is arranged in front of a CCD 30 and irradiated with infrared rays from the rear thereof by an infrared light source 27 having a plurality of infrared LEDs emitting infrared rays and infrared rays transmitted through the semiconductive element 23 are caught by the CCD imaging apparatus 34 and, further, the silhouette image of the semiconductor element 23 is formed on the basis of the signal from the CCD imaging apparatus 34 by an image processor 35 and displayed to inspect the internal state of the semiconductor element 23.
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