| 摘要 |
PROBLEM TO BE SOLVED: To provide a testing method and a testing apparatus which reduce the test time in a semiconductor testing apparatus having a digitizer and a DPS(digital signal processor) module which are used for inspecting a device under test(DUT) like an IC. SOLUTION: This testing apparatus consists of a digitizer 12 taking in measured data of a device under test and a DSP module 13 judging whether the device under test is acceptable on the basis of the measured data obtained by the digitizer. The digitizer consists of a storage device 23 locating the measured data, a first buffer for locating the measured data of the device under test in the storage device, a trigger controlling part 16A forming a trigger signal for starting to locate the measured data in the storage device, a second buffer sending the measured data stored in the storage device to the DSP module, and a storage device controlling means 20A for controlling read/write of the storage device.
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