| 摘要 |
PROBLEM TO BE SOLVED: To form an aperture of satisfactory precision for a resin film on a metal film by using a simple process. SOLUTION: A protrusion 65 is made to abut against a resin film 6 formed on a metal film 1, and ultrasonic vibration is applied, while the resin film 6 is pressed. The resin film 6 is dug, digging is stopped when the tip of the protrusion 65 abuts against the metal film 1, and an aperture part 8 is formed. By arranging the plurality of protrusions 65 at positions corresponding to the positions of the aperture parts 8 to be formed, the plurality of aperture parts 8 are formed simultaneously. Thereby the control of etchant is dispensed with, and precision is high also.
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