摘要 |
<p>PROBLEM TO BE SOLVED: To attain deformation quantity larger than shift quantity for a sample by providing a mechanism for vertically moving and pulling the sample. SOLUTION: Since a sample bed 1 fixing the sample 2 is fixed to a pulling base 4, the sample 2 is moved downward, when the pulling base 4 is moved downward. When the position of the sample 2 becomes lower than the tip of a fixed bed 3 installed on a stage base 12, the sample 2 is pressed to the fixed bed 3, the moving direction of the sample 2 is changed at both ends of the fixed bed 3, and the sample 2 is pulled in the horizontal direction. Since the pulling amount of the sample 2 becomes about two times the actual shift distance of the sample bed 1, it can cope with the sample 2 requiring a large pulling amount. The pulling direction of the sample 2 is preferably changed by changing the shapes of the sample bed 1 fixing the sample 2 and the fixed bed 3 pressing the sample 2, and a heater is provided on this sample stage to concurrently heat the sample 2.</p> |