| 摘要 |
PROBLEM TO BE SOLVED: To reduce deformation on an erosion shape by setting a maximum value and a minimum value within a specific range of an intermediate value regarding a magnetic characteristic of any one of a maximum permeability, a coercivity, and a squareness ratio on an initial magnetization curve, in a sputtering plane of a target. SOLUTION: In a magnetic target for magnetron sputtering, in a sputtering plate of a target, a maximum value and a minimum value of any one of a maximum permeability, a coercivity, and a squareness ratio on an initial magnetization curve are set within±15% of an intermediate value. When the value is beyond the range, deformation appears on an erosion shape. Further, upon manufacturing ingot target, a predetermined magnetic material is dissolved and casted into an ingot, and undergoes hot casting or rolling. Furthermore, the material undergoes cold working and is formed into a plate, a target shape, and so on. Additionally, with hot and cold cross rolling, upsetting casting and the like, it is possible to achieve a target which is small in magnetic anisotropy in the sputtering plane and has isotropic deformation.
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