| 摘要 |
PROBLEM TO BE SOLVED: To provide a high performance, inexpensive acceleration sensor having a relatively simple structure. SOLUTION: The vibration converter 20 in an acceleration sensor for converting a vibration into an electric signal comprises a fixed electrode 21 connected electrically with a metal case 29, a metallic diaphragm 23 having an electrode plane 23a facing the electrode plane 21a of the fixed electrode 21 while spaced apart in parallel by a predetermined interval d, an electret layer 25 formed on the electrode plane 21a of the fixed electrode 21, an insulator 37 for holding the diaphragm 23 in a case 29 while insulating it therefrom, a circuit board 31 contained in the case 29, an FET 33 mounted on the board 31 while being connected electrically with the diaphragm 23, a terminal 41 connected electrically with the FET 33 and taking out an electric signal therefrom, a connector section 39 for sealing the case 29 and connecting the terminal 41 electrically and mechanically with an external apparatus, wherein an acceleration is detected based on an electric signal from the vibration converter 20.
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