| 摘要 |
PROBLEM TO BE SOLVED: To effectively remove abrasive scraps in a polishing or cleaning waste liquor and agglomerated particles, to efficiently recover particles, which are used as an abrasive material or a cleaning agent, and to contrive to make it possible to reutilize the particles. SOLUTION: An abrasive waste liquor is concentrated and thereafter, after particles are separated from the concentrated abrasive waste liquor by a liquid cyclone 6, the less than 1-μm particle diameter particles are chiefly removed separately from the separated particles on the specified conditions by a filter 7a and the particle concentration is adjusted at 5 to 30% by a liquid particle concentration adjusting unit 8 to reproduce an abrasive liquid. The reproduced abrasive liquid is recycled in a semiconductor manufacturing device 1 in the state of a stationary flow by a circulating unit 5. In the filter 7a and the unit 5, the abrasive liquid is pushed out on a flow path at a gas pressure of an atmospheric pressure of 2 to 5 using 1 to 10% of water-containing inert gas, such as nitrogen gas, and the stationary flow of the abrasive liquid is formed.
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