| 摘要 |
PROBLEM TO BE SOLVED: To obtain a means for manufacturing, with an improved yield, a metal probe that is optimum for a probe for STM or the like that has a tip radius of curvature of approximately 10 nm or is smaller and has a smooth surface. SOLUTION: In the method for manufacturing a metal probe where one end of a wire is sharpened by vertically erecting the material wire for metal probe and immersing its one end side into an electrolyte for AC electrolytic polishing, an application voltage before shoulder cutting being generated during electrolytic polishing is set to a range of voltage where the radius of curvature of the probe tip in shoulder cutting becomes 100 nm or less and the diameter of the material wire on the electrolyte surface can be maintained at 40μm or more, the application voltage after shoulder cutting is set to a voltage that is higher than the application voltage before shoulder cutting and does not cause any arc from the wire tip for continuing polishing, and the polishing is completed when the wire tip leaves the electrolyte surface. Also, an AC frequency is set to 100-200 Hz immediately before completing polishing.
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