| 摘要 |
PROBLEM TO BE SOLVED: To reduce frictional force and plays of a bearing part which supports the stylus of a surface-property measuring probe. SOLUTION: A stylus 12 is attached to the tip of an arm 14. Arm shafts 16 are installed at the arm 14, and they are turnably supported by a frame 18 via pivot bearings 20 which are coupled to the arm shafts 16. A piezoelectric element 34 is laminated on the frame 18. When an AC voltage is applied to the piezoelectric element 34, very small vibrations are generated at the pivot bearings 20, and the frictional force of the bearings is reduced due to the vibration. Since the frictional force is reduced, it is possible to reduce the play of the bearings, which normally leads to an increases in the frictional force. The frictional force is reduced, and the play is reduced. Thereby, the linearity of this surface-property measuring probe between the displacement of the stylus and the detection value of the displacement is improved, and the measuring accuracy of the surface-property measuring probe is improved.
|
