发明名称 SOLID-STATE IMAGE SENSING DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To obtain a solid-state image sensing device which can restrain color mixing and has high sensitivity and also can improve color shading. SOLUTION: The device comprises an N-type silicon substrate 1, a photodiode PD formed inside the substrate 1, a charge transfer part structure 3 comprising transfer electrodes G1, G2 formed on the substrate 1 between the photodiodes PD and color filter layers 12, 13, 14 formed between the charge transfer part structures 3. As a result, a solid-state image sensing device which can restrain color mixing, has high sensitivity and also can improve color shading, and a manufacturing method thereof can be obtained.
申请公布号 JP2001077340(A) 申请公布日期 2001.03.23
申请号 JP19990251698 申请日期 1999.09.06
申请人 TOSHIBA CORP 发明人 NAKABAYASHI MASATOKI
分类号 H01L27/14;H01L27/148;H04N5/335;H04N5/361;H04N5/369;H04N5/3722;H04N5/3728;H04N9/07;(IPC1-7):H01L27/14 主分类号 H01L27/14
代理机构 代理人
主权项
地址