| 摘要 |
PROBLEM TO BE SOLVED: To form a high-quality polycrystal film even with fluctuation with the passage of time in energy density of irradiated laser beam, by projecting pulse laser with laser irradiation region shifted so that a second part is irradiated which is micro crystallized under previous laser projection. SOLUTION: A position of energy density distribution 6 is irradiated with laser. A region corresponding to a front shoulder part 6S is microcrystallized. A region corresponding to a top part 6T is made into amorphous again. As indicated with an energy density distribution 7, the laser irradiation region is moved in the positive direction of x-axis. Actually, a substrate 1 is moved in the negative direction of the x-axis. Here, the top part 7T of the energy density distribution 7 does not exceed the positive side edge of x-axis in the region which is micro-crystallized in the previous laser shot. The negative side edge of x-axis of the top part 7T does not exceed the negative side edge of x-axis in the region which is micro-crystallized in the previous shot.
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